| Part Number | Part Description | Compatible Manufacturer | Compatible Model(s) | Image |
|---|---|---|---|---|
| 000-1103-085 | Dofbc2-078 Rf Generator | ENI | LAM 2300 Etcher |  |
| 000-9286-083 | Dofbc2-083 Rf | ENI | LAM 2300 Etcher |  |
| 3005803 | Controller, Temperature, Aspen Ii | Mattson | Aspen II |  |
| 1006222 | Grid Intel 200Mm | Mattson | Aspen II, Aspen III |  |
| 1004997 | Computer, Ui, P4, Ups, Raid 1, 80G, Win, Nt | Mattson | Aspen II, Aspen III |  |
| 040-00003-00 | Gear | Mattson | Aspen II, Aspen III |  |
| 040-00011-00 | Gear | Mattson | Aspen II, Aspen III |  |
| 041-00049-00 | M Clamp Shuttle Rotation | Mattson | Aspen II, Aspen III |  |
| 080-21001-00 | Printed Circuit Board Opto-Sensor | Mattson | Aspen II, Aspen III |  |
| 139-00003-00 | Cover | Mattson | Aspen II, Aspen III |  |
| 139-00008-00 | Housing Gear | Mattson | Aspen II, Aspen III |  |
| 141-00067-00 | Pin Sensor | Mattson | Aspen II, Aspen III |  |
| 143-00011-00 | Cover Base Diffuser Loadlock | Mattson | Aspen II, Aspen III |  |
| 175-069046-001 | Chamber + Esc + Cathode | LAM | LAM 2300 Etcher |  |
| 181-21000-05 | Cable Assembly #310 Shtl Rot Up | Mattson | Aspen II, Aspen III |  |
| 199-21003-00 | Pin Alignment Robot Arms | Mattson | Aspen II, Aspen III |  |
| 246-92000-00 | Pcb Asy, Motor Control | Mattson | Aspen II, Aspen III |  |
| 255-03760-00 | R2005Sy R Axis Aspen Iii | Mattson | Aspen III |  |
| 255-03762-00 | Printed Circuit Board Assembly Atmosphere Robot Theta Axis Aspen Iii | Mattson | Aspen III |  |
| 255-05712-02 | Flexibale Printed Circuit Board/Cable Assembly 60Pin 18.0" | Mattson | Aspen II, Aspen III |  |
| 255-05714-00 | Flexibale Cable Printed Circuit Board Assembly 30 Pin Robot Aspen Iii | Mattson | Aspen III |  |
| 255-16059-00 | Printed Circuit Board Assembly Sensor Interface Aspen Iii | Mattson | Aspen III |  |
| 263-00521-00 | Cable Assembly, Robot Interface | Mattson | Aspen II, Aspen III |  |
| 263-01780-00 | Ncgbn50, 0178Us | Mattson | Aspen II, Aspen III |  |
| 263-02156-00 | Motor Assembly, Dc | Mattson | Aspen II, Aspen III |  |
| 263-05608-01 | Top Magnetic Door Sensor | Mattson | Aspen II, Aspen III |  |
| 263-05608-02 | Bottom Magnetic Door Sensor | Mattson | Aspen II, Aspen III |  |
| 263-05984-00 | Wafer, Sensor | Mattson | Aspen II, Aspen III |  |
| 263-05984-02 | Cable Assembly, Wafer Sensor, Prcs Mdl3, B | Mattson | Aspen II, Aspen III |  |
| 263-05984-03 | Cable Assembly, Wafer Sensor, Prcs Mdl3, A | Mattson | Aspen II, Aspen III |  |
| 263-05984-04 | Cable Assembly Wafer Sensor Process Module 2 B | Mattson | Aspen II, Aspen III |  |
| 263-05984-05 | Cable Assembly, Wafer Sensor, Prcs Mdl2, A | Mattson | Aspen II, Aspen III |  |
| 263-05984-06 | Obselete, Wafer, Sensor | Mattson | Aspen II, Aspen III |  |
| 263-05984-07 | Wafer, Sensor | Mattson | Aspen II, Aspen III |  |
| 263-06185-00 | Coil Asy, Silver Plated | Mattson | Aspen II, Aspen III |  |
| 263-06423-00 | Cable Assembly #303 Shtl Lift Up | Mattson | Aspen II, Aspen III |  |
| 263-08726-00 | Seal Housing Assembly Lift Door | Mattson | Aspen II, Aspen III |  |
| 263-08763-00 | Motor Assembly Atmosphere Robot R1 Axis | Mattson | Aspen II, Aspen III |  |
| 263-08764-00 | Motor Assembly Atmosphere Robot Rot Axis | Mattson | Aspen II, Aspen III |  |
| 263-08766-00 | Motor Assembly Atmosphereosph Robot Side/Side | Mattson | Aspen II, Aspen III |  |
| 263-09456-00 | Cable Assembly Home Sensor Rbt Aspen Iii | Mattson | Aspen III |  |
| 263-09642-00 | Motor Assembly Atmosphere Robot R2 | Mattson | Aspen II, Aspen III |  |
| 263-09702-01 | Upper Right Rotery Door Close Sensor | Mattson | Aspen II, Aspen III |  |
| 263-09702-02 | Upper Right Rotery Door Open Sensor | Mattson | Aspen II, Aspen III |  |
| 263-09702-03 | Lower, Right Rotery Door Close Sensor | Mattson | Aspen II, Aspen III |  |
| 263-09702-04 | Lower, Right Open Sensor | Mattson | Aspen II, Aspen III |  |
| 263-09702-05 | Lower, Left Rotery Door Open Sensor | Mattson | Aspen II, Aspen III |  |
| 263-09702-06 | Lower, Left Close Sensor | Mattson | Aspen II, Aspen III |  |
| 263-09702-07 | Upper, Left Rotery Door Open Sensor | Mattson | Aspen II, Aspen III |  |
| 263-09702-08 | Upper, Left Rotery Door Close Sensor | Mattson | Aspen II, Aspen III |  |
| 263-12063-06 | P6, Slit Door Close Pm2 Sensor | Mattson | Aspen II, Aspen III |  |
| 263-13176-00 | Motor Assembly Vacuum Robot Theta Axis | Mattson | Aspen II, Aspen III |  |
| 263-16758-00 | Assembly Motor Vacuum Robot R5 Axis | Mattson | Aspen II, Aspen III |  |
| 263-16760-00 | Assembly Motor Vacuum Robot Theta Axis | Mattson | Aspen II, Aspen III |  |
| 263-21199-00 | Assembly, 24Vdc Power Sply | Mattson | Aspen II, Aspen III |  |
| 263-23201-00 | Cable Assembly Slot Sensor Pos Logic Aspen Iii | Mattson | Aspen III |  |
| 302-06607-00 | Spring Slit Door | Mattson | Aspen II, Aspen III |  |
| 303-03020-00 | Exhaust, 6"Dia, Flr, Bot Style Ex | Mattson | Aspen II, Aspen III |  |
| 303-07405-00 | Plate Ht/Cl Black Strip | Mattson | Aspen II, Aspen III |  |
| 303-07406-00 | Nut Ht/Cl Black Strip | Mattson | Aspen II, Aspen III |  |
| 303-12796-00 | Flg Multi Range Heater 300Mm Strp | Mattson | Aspen II, Aspen III |  |
| 303-18075-00 | Fork Big Pully Tension | Mattson | Aspen II, Aspen III |  |
| 303-19995-00 | Adapter Fem 1/8Npt 1/4-20 L | Mattson | Aspen II, Aspen III |  |
| 303-21127-00 | Clamp Faraday Shield Icpht | Mattson | Aspen II, Aspen III |  |
| 303-21220-00 | Lift Pin Fixed Aspen Iii Icpht | Mattson | Aspen III |  |
| 303-23352-00 | Plug Grid Clamp Anodize Aspen Iii | Mattson | Aspen III |  |
| 304-15606-00 | Viewport Pyrex Strip Aspen Iii | Mattson | Aspen III |  |
| 304-21659-00 | Pin Corral Heater Block Icpht | Mattson | Aspen II, Aspen III |  |
| 304-23345-00 | Spacer Quartz Tube Install Universal | Mattson | Aspen II, Aspen III |  |
| 304-23510-00 | Gauge Go/No-Go Quartz Vessel | Mattson | Aspen II, Aspen III |  |
| 305-05040-00 | Pulley Short 24 Grv .08 Pt Aspen Iii | Mattson | Aspen III |  |
| 305-06712-00 | Filter Rfi/Emi 20A 120Vacuum Mod | Mattson | Aspen II, Aspen III |  |
| 305-07881-00 | Pulley Traverse Atmosphere Robot | Mattson | Aspen II, Aspen III |  |
| 400-01778-00 | Cylinder Air 1/2 Bore 110Mm St | Mattson | Aspen II, Aspen III |  |
| 405-05057-00 | Bearing 1/8 Bore 3/8Od Shld Abec-3 | Mattson | Aspen II, Aspen III |  |
| 405-05230-00 | Bearing Angular 1.875X1.50X.1875 | Mattson | Aspen II, Aspen III |  |
| 405-05360-00 | Bearing Flanged Radial Contact | Mattson | Aspen II, Aspen III |  |
| 405-20366-00 | Gearhead Planetary 20:1 Theta | Mattson | Aspen II, Aspen III |  |
| 405-24106-00 | Bearing Radial 1.3125X.875X.25 | Mattson | Aspen II, Aspen III |  |
| 411-08809-00 | Adapter Bayonet Thermc 7/8 L | Mattson | Aspen II, Aspen III |  |
| 425-09519-00 | Filter Vent Breather 1/4" | Mattson | Aspen II, Aspen III |  |
| 429-18750-00 | Gauge Analog 1M-1000T 1/4Vcr Male | Mattson | Aspen II, Aspen III |  |
| 430-05051-00 | Timing Belt 463Grv 3/8W .080Pt | Mattson | Aspen II, Aspen III |  |
| 430-05052-00 | Timing Belt 216Grv 3/8W .080Pt | Mattson | Aspen II, Aspen III |  |
| 430-05487-00 | Belt Tmg 537Mmpl 179T 15Mmw | Mattson | Aspen II, Aspen III |  |
| 430-05615-00 | Timing Belt 105Grv 1/5 P 3/8Wd | Mattson | Aspen II, Aspen III |  |
| 430-05619-00 | Timing Belt 72Grv 1/5P 3/8" | Mattson | Aspen II, Aspen III |  |
| 430-05620-00 | Timing Belt 125Grv .080P 1/4" | Mattson | Aspen II, Aspen III |  |
| 430-07197-00 | Timing Belt 1/5Pt 1/2Blt 80Ft St | Mattson | Aspen II, Aspen III |  |
| 441-04584-00 | Label Warning High Volt 5 Language | Mattson | Aspen II, Aspen III |  |
| 456-00226-07 | O-Ring 1.234 Id X .139Cs Viton | Mattson | Aspen II, Aspen III |  |
| 456-00226-64 | O-Ring .921Id X .139 Cs Viton | Mattson | Aspen II, Aspen III |  |
| 456-00226-66 | O-Ring .671Id X .139 Cs Viton | Mattson | Aspen II, Aspen III |  |
| 456-00226-80 | O-Ring 0.426 Id X .070Cs Viton | Mattson | Aspen II, Aspen III |  |
| 456-00226-91 | O-Ring 1.112Id X .103Cs Viton | Mattson | Aspen II, Aspen III |  |
| 456-00226-92 | O-Ring 10.984Id X .139Cs Viton | Mattson | Aspen II, Aspen III |  |
| 456-00722-07 | O-Ring .468 Id X .078 W Kalrez | Mattson | Aspen II, Aspen III |  |
| 456-00722-08 | O-Ring 2.85 Id X .210 W Kalrez | Mattson | Aspen II, Aspen III |  |
| 456-00749-00 | Seal Center Ring Nw40 | Mattson | Aspen II, Aspen III |  |
| 456-01027-04 | O-Ring 3.359 Id X.139W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-06 | O-Ring 1.734 Id X.139W Florosi | Mattson | Aspen II, Aspen III |  |
| 456-01027-07 | O-Ring 1.475 Id X.210W Florosi | Mattson | Aspen II, Aspen III |  |
| 456-01027-10 | O-Ring 4.475 Id X .210W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-19 | O-Ring 3.109 Id X .139W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-21 | O-Ring 18.955 Id X .210W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-26 | O-Ring 1.859 Id X .139W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-28 | O-Ring 6.725 Id X .210W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-29 | O-Ring .600 Id X .210W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-30 | O-Ring 3.484 Id X .139W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-31 | 67036O-Ring 6.484 Id X .139W Floro | Mattson | Aspen II, Aspen III |  |
| 456-01027-42 | O-Ring .859Id X .139W Fluro | Mattson | Aspen II, Aspen III |  |
| 456-04229-11 | O-Ring .239 Id X .064W Parofl | Mattson | Aspen II, Aspen III |  |
| 456-05406-00 | Seal Centering Nw100 Al | Mattson | Aspen II, Aspen III |  |
| 456-05784-02 | O-Ring 27.80 Id X .210Cs Floro | Mattson | Aspen II, Aspen III |  |
| 456-05884-00 | O-Ring 51.39X.210 75Dur Viton | Mattson | Aspen II, Aspen III |  |
| 456-05887-00 | O-Ring 19.95X.210 50Dur Viton | Mattson | Aspen II, Aspen III |  |
| 456-05888-00 | O-Ring 29.10X.210 75Dur Viton | Mattson | Aspen II, Aspen III |  |
| 456-05889-00 | O-Ring 23.55X.139 75Dur Viton | Mattson | Aspen II, Aspen III |  |
| 456-05891-00 | O-Ring 28.90X.210 75Dur Viton | Mattson | Aspen II, Aspen III |  |
| 456-08727-03 | Seal Quad 2.234Idx.139 Viton | Mattson | Aspen II, Aspen III |  |
| 456-09062-00 | Seal Housing Mounted Unlubricated | Mattson | Aspen II, Aspen III |  |
| 456-09610-02 | O-Ring 7.725Id .210Cs 60Dur Fluoro | Mattson | Aspen II, Aspen III |  |
| 456-12299-00 | O-Ring 18.95X.210 60Dur Fluoro | Mattson | Aspen II, Aspen III |  |
| 456-15181-06 | O-Ring 7.72Idx.21W Kalrez 8375 | Mattson | Aspen II, Aspen III |  |
| 456-20260-00 | O-Ring Paddle Kalrez 8575 | Mattson | Aspen II, Aspen III |  |
| 456-22632-00 | O-Ring 60 Duro Viton | Mattson | Aspen II, Aspen III |  |
| 456-24416-00 | O-Ring Kalrez -155 8085St Nw100 | Mattson | Aspen II, Aspen III |  |
| 467-05893-00 | Regulator N2 | Mattson | Aspen II, Aspen III |  |
| 468-00750-00 | Clamp Nw40 | Mattson | Aspen II, Aspen III |  |
| 468-05061-00 | Ring Retainer Grip 1/8 Shaft | Mattson | Aspen II, Aspen III |  |
| 475-00497-03 | Screw Schd 10-32 X 3/8 Stain Less Steel | Mattson | Aspen II, Aspen III |  |
| 480-05056-00 | Spacer Shft .187Odx.125Idx.063Th | Mattson | Aspen II, Aspen III |  |
| 482-05492-00 | Brake Spring Applied 24Vdc | Mattson | Aspen II, Aspen III |  |
| 482-08864-00 | Spring Cmprsn .42Odx.88Fl | Mattson | Aspen II, Aspen III |  |
| 482-08865-00 | Spring Cmprsn .24Odx.88Fl | Mattson | Aspen II, Aspen III |  |
| 482-09141-00 | Spring Extentiion 2.0L .055 Ms Wire | Mattson | Aspen II, Aspen III |  |
| 483-13911-00 | Switch Vacuum 100 Torr W/Kf16 Flange | Mattson | Aspen II, Aspen III |  |
| 483-17182-00 | Switch Vacuum 100 Torr W/Kf25 Fl | Mattson | Aspen II, Aspen III |  |
| 487-00478-08 | Fitting Conn 3/8 Tb To 9/16-18Thrd | Mattson | Aspen II, Aspen III |  |
| 487-05830-00 | Fitting Spd Cntrl 1/8Npt 06 Tb Dia | Mattson | Aspen II, Aspen III |  |
| 491-23011-00 | Kit Vat Dn100 Seal Kalrez 8085 Stain Less Steel | Mattson | Aspen II, Aspen III |  |
| 491-23078-00 | Kit Dn100 Seal Kalrez 8085 | Mattson | Aspen II, Aspen III |  |
| 493-08556-00 | Valve Diaphragm Hi-Flow Nc 5Ra | Mattson | Aspen II, Aspen III |  |
| 493-16983-00 | Valve Swagelok Pneumatic Female/Female 1/4Vcr 5R | Mattson | Aspen II, Aspen III |  |
| 497-00477-05 | Washer Spring Lock #6 Stain Less Steel | Mattson | Aspen II, Aspen III |  |
| 497-00512-09 | Washer Flat #10 Stain Less Steel | Mattson | Aspen II, Aspen III |  |
| 497-05232-00 | Washer Wave Sprg 1.235Odx.961Id | Mattson | Aspen II, Aspen III |  |
| 497-05233-00 | Washer Curved 3/8Idx.40Od | Mattson | Aspen II, Aspen III |  |
| 501-23880-00 | Ampl Pmc/Pmac Q26/D16 New | Mattson | Aspen II, Aspen III |  |
| 504-18756-00 | Battery Lithium 3.6V 1.0Ah | Mattson | Aspen II, Aspen III |  |
| 510-21288-00 | Capacitor 150Pf | Mattson | Aspen II, Aspen III |  |
| 513-08420-00 | Plg, 3P, 4Wire, 30A, 240V, Ul489 | Mattson | Aspen II, Aspen III |  |
| 515-21084-00 | Service Box, Press Cntrl Pm6 | Mattson | Aspen II, Aspen III |  |
| 525-00332-00 | Fuse 7.5 Amp Fnq Type | Mattson | Aspen II, Aspen III |  |
| 529-07008-00 | Power Supply 8A 50/60Hz | Mattson | Aspen II, Aspen III |  |
| 529-12474-00 | Power Supply Assembly, 200/240V Ce | Mattson | Aspen II, Aspen III |  |
| 529-12867-00 | Power Supply Rs232 Mux 110/220Vacuum | Mattson | Aspen II, Aspen III |  |
| 533-17226-00 | Heater, Element | Mattson | Aspen II, Aspen III |  |
| 544-00032-01 | Bracket, Coil Support | Mattson | Aspen II, Aspen III |  |
| 544-00032-04 | Bracket Coil Support | Mattson | Aspen II, Aspen III |  |
| 566-03902-00 | Relay Power "Off-Delay" 240V Dpdt | Mattson | Aspen II, Aspen III |  |
| 575-05490-00 | Sensor Convergent Mode Nrw Prof | Mattson | Aspen II, Aspen III |  |
| 575-800325-417 | 575-800325-417 Gas Boxes For Flex Ex+ Pm | LAM | LAM 2300 Etcher |  |
| 579-15264-00 | Sensor Fiber Optic Trhough Beam | Mattson | Aspen II, Aspen III |  |
| 635-02946-00 | Lubricant Isoflex Nca 15 | Mattson | Aspen II, Aspen III |  |
| 635-08804-00 | Grease Fomblin Rt-15 In Syrg | Mattson | Aspen II, Aspen III |  |
| 635-14245-00 | Grease Christo-Lube Mcg 200A | Mattson | Aspen II, Aspen III |  |
| 65048-PH52-0002 | Pendulum Valves 65048-Ph52-Biv1 | LAM | LAM 2300 Etcher |  |
| 65048-PH52-ADR1 | Pendulum Valves 65048-Ph52-Adr1 | LAM | LAM 2300 Etcher |  |
| 660-002295-002 | Dofbc2-084 Rf Generator | ENI | LAM 2300 Etcher |  |
| 660-034419-010 | Rf Generator Ae Advanced Energyvhf Ovation 2560Sf | ENI | LAM 2300 Etcher |  |
| 660-072825-200 | Rf Generator Lvf3527A | ENI | LAM 2300 Etcher |  |
| 660-080455R300 | Spectrum B-8502 | ENI | LAM 2300 Etcher |  |
| 713-801020-008 | Chamber + Esc + Cathode | LAM | LAM 2300 Etcher |  |
| 715-801020-118 | Chamber + Esc + Cathode | LAM | LAM 2300 Etcher |  |
| 853-065009-006 | Top Chamber 853-065009-006 | LAM | LAM 2300 Etcher |  |
| 853-065009-516 | Chamber + Esc + Cathode | LAM | LAM 2300 Etcher |  |
| 853-802298-018 | 853-802298-018 Elevator | LAM | LAM 2300 Etcher |  |
| 910-10027-00 | Bearing .375X.875X.218 | Mattson | Aspen II, Aspen III |  |
| 910-11001-00 | Bearing Oil-Less 3/16X1/4 | Mattson | Aspen II, Aspen III |  |
| 912-14005-00 | Washer Spring Special | Mattson | Aspen II, Aspen III |  |
| 912-14014-00 | Washer Spring 0.87X0.62X.062 | Mattson | Aspen II, Aspen III |  |
| 912-21001-00 | Pin Robot Alignment | Mattson | Aspen II, Aspen III |  |
| 913-10029-00 | O-Ring 1.296 Id X .139Cs Viton | Mattson | Aspen II, Aspen III |  |
| 913-10030-00 | O-Ring 1.049 Id X .103Cs Viton | Mattson | Aspen II, Aspen III |  |
| 913-10031-00 | O-Ring 1.987 Id X .103Cs Viton | Mattson | Aspen II, Aspen III |  |
| 913-10035-00 | O-Ring 1.475 Id .210Cs | Mattson | Aspen II, Aspen III |  |
| 913-10038-00 | O-Ring 16.955 Id X .210Cs | Mattson | Aspen II, Aspen III |  |
| 913-10044-00 | O-Ring 1.734 Id X .139Cs | Mattson | Aspen II, Aspen III |  |
| 913-10048-00 | O-Ring 2.734 Id X .139Cs | Mattson | Aspen II, Aspen III |  |
| 913-10053-00 | O-Ring 18.955 Id X .210Cs Silicon | Mattson | Aspen II, Aspen III |  |
| 913-11001-00 | Seal Lip Flanged 1.125 Dia | Mattson | Aspen II, Aspen III |  |
| 914-12013-00 | Seal Center Ring Nw16 Alum | Mattson | Aspen II, Aspen III |  |
| 914-17005-00 | Tubing Poly 4Mm Od Blue | Mattson | Aspen II, Aspen III |  |
| 933-11005-00 | Relay 10Amp 24Vdc Soc Mount | Mattson | Aspen II, Aspen III |  |
| 999-11001-00 | Lubricant, Seal And Vacuum | Mattson | Aspen II, Aspen III |  |
| LFV3560A | Lfv3560A | ENI | LAM 2300 Etcher |  |
| PT59Z0Z00 | Scu-1500 Universal Stp Turbo Vacuum Pump Controller | Edwards | LAM 2300 Etcher |  |
| TMP-2084LMC | Turbopump Tmp-2084Lmc(L1) | Shimadzu | LAM 2300 Etcher |  |
| YT76Z0Z00 | Scu-1600 Turbo Pump Control Unit | Edwards | LAM 2300 Etcher |  |