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Parts


Part NumberPart DescriptionCompatible ManufacturerCompatible Model(s)Image
000-1103-085Dofbc2-078 Rf GeneratorENILAM 2300 Etcher
000-9286-083Dofbc2-083 RfENILAM 2300 Etcher
3005803Controller, Temperature, Aspen IiMattsonAspen II
1006222Grid Intel 200MmMattsonAspen II, Aspen III
1004997Computer, Ui, P4, Ups, Raid 1, 80G, Win, NtMattsonAspen II, Aspen III
040-00003-00GearMattsonAspen II, Aspen III
040-00011-00GearMattsonAspen II, Aspen III
041-00049-00M Clamp Shuttle RotationMattsonAspen II, Aspen III
080-21001-00Printed Circuit Board Opto-SensorMattsonAspen II, Aspen III
139-00003-00CoverMattsonAspen II, Aspen III
139-00008-00Housing GearMattsonAspen II, Aspen III
141-00067-00Pin SensorMattsonAspen II, Aspen III
143-00011-00Cover Base Diffuser LoadlockMattsonAspen II, Aspen III
175-069046-001Chamber + Esc + CathodeLAMLAM 2300 Etcher
181-21000-05Cable Assembly #310 Shtl Rot UpMattsonAspen II, Aspen III
199-21003-00Pin Alignment Robot ArmsMattsonAspen II, Aspen III
246-92000-00Pcb Asy, Motor ControlMattsonAspen II, Aspen III
255-03760-00R2005Sy R Axis Aspen IiiMattsonAspen III
255-03762-00Printed Circuit Board Assembly Atmosphere Robot Theta Axis Aspen IiiMattsonAspen III
255-05712-02Flexibale Printed Circuit Board/Cable Assembly 60Pin 18.0"MattsonAspen II, Aspen III
255-05714-00Flexibale Cable Printed Circuit Board Assembly 30 Pin Robot Aspen IiiMattsonAspen III
255-16059-00Printed Circuit Board Assembly Sensor Interface Aspen IiiMattsonAspen III
263-00521-00Cable Assembly, Robot InterfaceMattsonAspen II, Aspen III
263-01780-00Ncgbn50, 0178UsMattsonAspen II, Aspen III
263-02156-00Motor Assembly, DcMattsonAspen II, Aspen III
263-05608-01Top Magnetic Door SensorMattsonAspen II, Aspen III
263-05608-02Bottom Magnetic Door SensorMattsonAspen II, Aspen III
263-05984-00Wafer, SensorMattsonAspen II, Aspen III
263-05984-02Cable Assembly, Wafer Sensor, Prcs Mdl3, BMattsonAspen II, Aspen III
263-05984-03Cable Assembly, Wafer Sensor, Prcs Mdl3, AMattsonAspen II, Aspen III
263-05984-04Cable Assembly Wafer Sensor Process Module 2 BMattsonAspen II, Aspen III
263-05984-05Cable Assembly, Wafer Sensor, Prcs Mdl2, AMattsonAspen II, Aspen III
263-05984-06Obselete, Wafer, SensorMattsonAspen II, Aspen III
263-05984-07Wafer, SensorMattsonAspen II, Aspen III
263-06185-00Coil Asy, Silver PlatedMattsonAspen II, Aspen III
263-06423-00Cable Assembly #303 Shtl Lift UpMattsonAspen II, Aspen III
263-08726-00Seal Housing Assembly Lift DoorMattsonAspen II, Aspen III
263-08763-00Motor Assembly Atmosphere Robot R1 AxisMattsonAspen II, Aspen III
263-08764-00Motor Assembly Atmosphere Robot Rot AxisMattsonAspen II, Aspen III
263-08766-00Motor Assembly Atmosphereosph Robot Side/SideMattsonAspen II, Aspen III
263-09456-00Cable Assembly Home Sensor Rbt Aspen IiiMattsonAspen III
263-09642-00Motor Assembly Atmosphere Robot R2MattsonAspen II, Aspen III
263-09702-01Upper Right Rotery Door Close SensorMattsonAspen II, Aspen III
263-09702-02Upper Right Rotery Door Open SensorMattsonAspen II, Aspen III
263-09702-03Lower, Right Rotery Door Close SensorMattsonAspen II, Aspen III
263-09702-04Lower, Right Open SensorMattsonAspen II, Aspen III
263-09702-05Lower, Left Rotery Door Open SensorMattsonAspen II, Aspen III
263-09702-06Lower, Left Close SensorMattsonAspen II, Aspen III
263-09702-07Upper, Left Rotery Door Open SensorMattsonAspen II, Aspen III
263-09702-08Upper, Left Rotery Door Close SensorMattsonAspen II, Aspen III
263-12063-06P6, Slit Door Close Pm2 SensorMattsonAspen II, Aspen III
263-13176-00Motor Assembly Vacuum Robot Theta AxisMattsonAspen II, Aspen III
263-16758-00Assembly Motor Vacuum Robot R5 AxisMattsonAspen II, Aspen III
263-16760-00Assembly Motor Vacuum Robot Theta AxisMattsonAspen II, Aspen III
263-21199-00Assembly, 24Vdc Power SplyMattsonAspen II, Aspen III
263-23201-00Cable Assembly Slot Sensor Pos Logic Aspen IiiMattsonAspen III
302-06607-00Spring Slit DoorMattsonAspen II, Aspen III
303-03020-00Exhaust, 6"Dia, Flr, Bot Style ExMattsonAspen II, Aspen III
303-07405-00Plate Ht/Cl Black StripMattsonAspen II, Aspen III
303-07406-00Nut Ht/Cl Black StripMattsonAspen II, Aspen III
303-12796-00Flg Multi Range Heater 300Mm StrpMattsonAspen II, Aspen III
303-18075-00Fork Big Pully TensionMattsonAspen II, Aspen III
303-19995-00Adapter Fem 1/8Npt 1/4-20 LMattsonAspen II, Aspen III
303-21127-00Clamp Faraday Shield IcphtMattsonAspen II, Aspen III
303-21220-00Lift Pin Fixed Aspen Iii IcphtMattsonAspen III
303-23352-00Plug Grid Clamp Anodize Aspen IiiMattsonAspen III
304-15606-00Viewport Pyrex Strip Aspen IiiMattsonAspen III
304-21659-00Pin Corral Heater Block IcphtMattsonAspen II, Aspen III
304-23345-00Spacer Quartz Tube Install UniversalMattsonAspen II, Aspen III
304-23510-00Gauge Go/No-Go Quartz VesselMattsonAspen II, Aspen III
305-05040-00Pulley Short 24 Grv .08 Pt Aspen IiiMattsonAspen III
305-06712-00Filter Rfi/Emi 20A 120Vacuum ModMattsonAspen II, Aspen III
305-07881-00Pulley Traverse Atmosphere RobotMattsonAspen II, Aspen III
400-01778-00Cylinder Air 1/2 Bore 110Mm StMattsonAspen II, Aspen III
405-05057-00Bearing 1/8 Bore 3/8Od Shld Abec-3MattsonAspen II, Aspen III
405-05230-00Bearing Angular 1.875X1.50X.1875MattsonAspen II, Aspen III
405-05360-00Bearing Flanged Radial ContactMattsonAspen II, Aspen III
405-20366-00Gearhead Planetary 20:1 ThetaMattsonAspen II, Aspen III
405-24106-00Bearing Radial 1.3125X.875X.25MattsonAspen II, Aspen III
411-08809-00Adapter Bayonet Thermc 7/8 LMattsonAspen II, Aspen III
425-09519-00Filter Vent Breather 1/4"MattsonAspen II, Aspen III
429-18750-00Gauge Analog 1M-1000T 1/4Vcr MaleMattsonAspen II, Aspen III
430-05051-00Timing Belt 463Grv 3/8W .080PtMattsonAspen II, Aspen III
430-05052-00Timing Belt 216Grv 3/8W .080PtMattsonAspen II, Aspen III
430-05487-00Belt Tmg 537Mmpl 179T 15MmwMattsonAspen II, Aspen III
430-05615-00Timing Belt 105Grv 1/5 P 3/8WdMattsonAspen II, Aspen III
430-05619-00Timing Belt 72Grv 1/5P 3/8"MattsonAspen II, Aspen III
430-05620-00Timing Belt 125Grv .080P 1/4"MattsonAspen II, Aspen III
430-07197-00Timing Belt 1/5Pt 1/2Blt 80Ft StMattsonAspen II, Aspen III
441-04584-00Label Warning High Volt 5 LanguageMattsonAspen II, Aspen III
456-00226-07O-Ring 1.234 Id X .139Cs VitonMattsonAspen II, Aspen III
456-00226-64O-Ring .921Id X .139 Cs VitonMattsonAspen II, Aspen III
456-00226-66O-Ring .671Id X .139 Cs VitonMattsonAspen II, Aspen III
456-00226-80O-Ring 0.426 Id X .070Cs VitonMattsonAspen II, Aspen III
456-00226-91O-Ring 1.112Id X .103Cs VitonMattsonAspen II, Aspen III
456-00226-92O-Ring 10.984Id X .139Cs VitonMattsonAspen II, Aspen III
456-00722-07O-Ring .468 Id X .078 W KalrezMattsonAspen II, Aspen III
456-00722-08O-Ring 2.85 Id X .210 W KalrezMattsonAspen II, Aspen III
456-00749-00Seal Center Ring Nw40MattsonAspen II, Aspen III
456-01027-04O-Ring 3.359 Id X.139W FloroMattsonAspen II, Aspen III
456-01027-06O-Ring 1.734 Id X.139W FlorosiMattsonAspen II, Aspen III
456-01027-07O-Ring 1.475 Id X.210W FlorosiMattsonAspen II, Aspen III
456-01027-10O-Ring 4.475 Id X .210W FloroMattsonAspen II, Aspen III
456-01027-19O-Ring 3.109 Id X .139W FloroMattsonAspen II, Aspen III
456-01027-21O-Ring 18.955 Id X .210W FloroMattsonAspen II, Aspen III
456-01027-26O-Ring 1.859 Id X .139W FloroMattsonAspen II, Aspen III
456-01027-28O-Ring 6.725 Id X .210W FloroMattsonAspen II, Aspen III
456-01027-29O-Ring .600 Id X .210W FloroMattsonAspen II, Aspen III
456-01027-30O-Ring 3.484 Id X .139W FloroMattsonAspen II, Aspen III
456-01027-3167036O-Ring 6.484 Id X .139W FloroMattsonAspen II, Aspen III
456-01027-42O-Ring .859Id X .139W FluroMattsonAspen II, Aspen III
456-04229-11O-Ring .239 Id X .064W ParoflMattsonAspen II, Aspen III
456-05406-00Seal Centering Nw100 AlMattsonAspen II, Aspen III
456-05784-02O-Ring 27.80 Id X .210Cs FloroMattsonAspen II, Aspen III
456-05884-00O-Ring 51.39X.210 75Dur VitonMattsonAspen II, Aspen III
456-05887-00O-Ring 19.95X.210 50Dur VitonMattsonAspen II, Aspen III
456-05888-00O-Ring 29.10X.210 75Dur VitonMattsonAspen II, Aspen III
456-05889-00O-Ring 23.55X.139 75Dur VitonMattsonAspen II, Aspen III
456-05891-00O-Ring 28.90X.210 75Dur VitonMattsonAspen II, Aspen III
456-08727-03Seal Quad 2.234Idx.139 VitonMattsonAspen II, Aspen III
456-09062-00Seal Housing Mounted UnlubricatedMattsonAspen II, Aspen III
456-09610-02O-Ring 7.725Id .210Cs 60Dur FluoroMattsonAspen II, Aspen III
456-12299-00O-Ring 18.95X.210 60Dur FluoroMattsonAspen II, Aspen III
456-15181-06O-Ring 7.72Idx.21W Kalrez 8375MattsonAspen II, Aspen III
456-20260-00O-Ring Paddle Kalrez 8575MattsonAspen II, Aspen III
456-22632-00O-Ring 60 Duro VitonMattsonAspen II, Aspen III
456-24416-00O-Ring Kalrez -155 8085St Nw100MattsonAspen II, Aspen III
467-05893-00Regulator N2MattsonAspen II, Aspen III
468-00750-00Clamp Nw40MattsonAspen II, Aspen III
468-05061-00Ring Retainer Grip 1/8 ShaftMattsonAspen II, Aspen III
475-00497-03Screw Schd 10-32 X 3/8 Stain Less SteelMattsonAspen II, Aspen III
480-05056-00Spacer Shft .187Odx.125Idx.063ThMattsonAspen II, Aspen III
482-05492-00Brake Spring Applied 24VdcMattsonAspen II, Aspen III
482-08864-00Spring Cmprsn .42Odx.88FlMattsonAspen II, Aspen III
482-08865-00Spring Cmprsn .24Odx.88FlMattsonAspen II, Aspen III
482-09141-00Spring Extentiion 2.0L .055 Ms WireMattsonAspen II, Aspen III
483-13911-00Switch Vacuum 100 Torr W/Kf16 FlangeMattsonAspen II, Aspen III
483-17182-00Switch Vacuum 100 Torr W/Kf25 FlMattsonAspen II, Aspen III
487-00478-08Fitting Conn 3/8 Tb To 9/16-18ThrdMattsonAspen II, Aspen III
487-05830-00Fitting Spd Cntrl 1/8Npt 06 Tb DiaMattsonAspen II, Aspen III
491-23011-00Kit Vat Dn100 Seal Kalrez 8085 Stain Less SteelMattsonAspen II, Aspen III
491-23078-00Kit Dn100 Seal Kalrez 8085MattsonAspen II, Aspen III
493-08556-00Valve Diaphragm Hi-Flow Nc 5RaMattsonAspen II, Aspen III
493-16983-00Valve Swagelok Pneumatic Female/Female 1/4Vcr 5RMattsonAspen II, Aspen III
497-00477-05Washer Spring Lock #6 Stain Less SteelMattsonAspen II, Aspen III
497-00512-09Washer Flat #10 Stain Less SteelMattsonAspen II, Aspen III
497-05232-00Washer Wave Sprg 1.235Odx.961IdMattsonAspen II, Aspen III
497-05233-00Washer Curved 3/8Idx.40OdMattsonAspen II, Aspen III
501-23880-00Ampl Pmc/Pmac Q26/D16 NewMattsonAspen II, Aspen III
504-18756-00Battery Lithium 3.6V 1.0AhMattsonAspen II, Aspen III
510-21288-00Capacitor 150PfMattsonAspen II, Aspen III
513-08420-00Plg, 3P, 4Wire, 30A, 240V, Ul489MattsonAspen II, Aspen III
515-21084-00Service Box, Press Cntrl Pm6MattsonAspen II, Aspen III
525-00332-00Fuse 7.5 Amp Fnq TypeMattsonAspen II, Aspen III
529-07008-00Power Supply 8A 50/60HzMattsonAspen II, Aspen III
529-12474-00Power Supply Assembly, 200/240V CeMattsonAspen II, Aspen III
529-12867-00Power Supply Rs232 Mux 110/220VacuumMattsonAspen II, Aspen III
533-17226-00Heater, ElementMattsonAspen II, Aspen III
544-00032-01Bracket, Coil SupportMattsonAspen II, Aspen III
544-00032-04Bracket Coil SupportMattsonAspen II, Aspen III
566-03902-00Relay Power "Off-Delay" 240V DpdtMattsonAspen II, Aspen III
575-05490-00Sensor Convergent Mode Nrw ProfMattsonAspen II, Aspen III
575-800325-417575-800325-417 Gas Boxes For Flex Ex+ PmLAMLAM 2300 Etcher
579-15264-00Sensor Fiber Optic Trhough BeamMattsonAspen II, Aspen III
635-02946-00Lubricant Isoflex Nca 15MattsonAspen II, Aspen III
635-08804-00Grease Fomblin Rt-15 In SyrgMattsonAspen II, Aspen III
635-14245-00Grease Christo-Lube Mcg 200AMattsonAspen II, Aspen III
65048-PH52-0002Pendulum Valves 65048-Ph52-Biv1LAMLAM 2300 Etcher
65048-PH52-ADR1Pendulum Valves 65048-Ph52-Adr1LAMLAM 2300 Etcher
660-002295-002Dofbc2-084 Rf GeneratorENILAM 2300 Etcher
660-034419-010Rf Generator Ae Advanced Energyvhf Ovation 2560SfENILAM 2300 Etcher
660-072825-200Rf Generator Lvf3527AENILAM 2300 Etcher
660-080455R300Spectrum B-8502ENILAM 2300 Etcher
713-801020-008Chamber + Esc + CathodeLAMLAM 2300 Etcher
715-801020-118Chamber + Esc + CathodeLAMLAM 2300 Etcher
853-065009-006Top Chamber 853-065009-006LAMLAM 2300 Etcher
853-065009-516Chamber + Esc + CathodeLAMLAM 2300 Etcher
853-802298-018853-802298-018 ElevatorLAMLAM 2300 Etcher
910-10027-00Bearing .375X.875X.218MattsonAspen II, Aspen III
910-11001-00Bearing Oil-Less 3/16X1/4MattsonAspen II, Aspen III
912-14005-00Washer Spring SpecialMattsonAspen II, Aspen III
912-14014-00Washer Spring 0.87X0.62X.062MattsonAspen II, Aspen III
912-21001-00Pin Robot AlignmentMattsonAspen II, Aspen III
913-10029-00O-Ring 1.296 Id X .139Cs VitonMattsonAspen II, Aspen III
913-10030-00O-Ring 1.049 Id X .103Cs VitonMattsonAspen II, Aspen III
913-10031-00O-Ring 1.987 Id X .103Cs VitonMattsonAspen II, Aspen III
913-10035-00O-Ring 1.475 Id .210CsMattsonAspen II, Aspen III
913-10038-00O-Ring 16.955 Id X .210CsMattsonAspen II, Aspen III
913-10044-00O-Ring 1.734 Id X .139CsMattsonAspen II, Aspen III
913-10048-00O-Ring 2.734 Id X .139CsMattsonAspen II, Aspen III
913-10053-00O-Ring 18.955 Id X .210Cs SiliconMattsonAspen II, Aspen III
913-11001-00Seal Lip Flanged 1.125 DiaMattsonAspen II, Aspen III
914-12013-00Seal Center Ring Nw16 AlumMattsonAspen II, Aspen III
914-17005-00Tubing Poly 4Mm Od BlueMattsonAspen II, Aspen III
933-11005-00Relay 10Amp 24Vdc Soc MountMattsonAspen II, Aspen III
999-11001-00Lubricant, Seal And VacuumMattsonAspen II, Aspen III
LFV3560ALfv3560AENILAM 2300 Etcher
PT59Z0Z00Scu-1500 Universal Stp Turbo Vacuum Pump ControllerEdwardsLAM 2300 Etcher
TMP-2084LMCTurbopump Tmp-2084Lmc(L1)ShimadzuLAM 2300 Etcher
YT76Z0Z00Scu-1600 Turbo Pump Control UnitEdwardsLAM 2300 Etcher